Characterisation of a Plasma Beam Source During
Duplex Treatment of High Speed Steel for Depositing DLC Coatings
M. Fenker , M. Balzer, N. Bermayer, Forschungsinstitut
Edelmetalle & Metallchemie, Germany,
M. Rinke, M. Stüber,
S. Ulrich, J. Ye, Forschungszentrum Karlsruhe GmbH,
Germany
The 36th International Conference on Metallurgical
Coatings and Thin Films,
Vortrag, Carbon and Nitride Materials:
Synthesis-Structure-Property Relationships, Diamond and Diamond-Like Carbon
Materials, 27.04.2009
Plasma characterisation methods have been utilised to study a duplex process, consisting of plasma nitriding of high speed steel (HSS) and subsequently
depositing a DLC (a-C:H) coating. Both treatments are performed
by using a plasma beam source. For the plasma nitriding
a gas mixture of N2/H2 was used. The nitriding
duration was varied and the substrate temperatures ranged from 400 to 500 oC. The subsequent DLC deposition was performed at 100 oC with acetylene as precursor gas. The formation of a
white layer could be avoided by suitable adjustment of the process parameters,
resulting in well-adherent DLC coatings for nitriding
depths ≥ 20 μm. Plasma characterisation
methods – like optical emission spectroscopy, mass spectroscopy, Langmuir
probe, electrical double probe, retarding field analyser
and Faraday cup measurements – have been conducted to understand the influence
of the plasma parameters on the nitriding behaviour and t he DLC film growth. The hardness of the a-C:H coatings was in the range of 1200 – 3000 HV, decreasing
with increasing acetylene flow due to a decrease of the kinetic energy of the CxHy molecules impinging on the growing film surface. Raman
spectroscopy showed a shifted G-peak at 1530 cm -1 and a shifted D-peak. The
friction coefficients in dry pin-on-disk tests with an Al2O3 counterpart and a
load of 10 N were in the range of 0.05 and 0.10. In conclusion, it could be
shown that the duplex treatment with a plasma beam source has been optimised by correlating the plasma parameters with the
properties of the coated parts.