Laser-assisted surface structuring, modification and functionalization on micro- and nanometer-scale


Wilhelm Pfleging


Karlsruhe Institute of Technology - KIT, Institute for Materials Research I,
Eggenstein-Leopoldshafen, 76341, Germany







Abstract text


Within the new founded Karlsruhe Institute of Technology (KIT) the research programme NANOMICRO is a main key technology. In cooperation with European partners the first European Infrastructure for micro and nano fabrication and characterisation (EUMINAfab) was established. Free access is offered to 36 installations with the necessary technical support personnel in the areas of micro and nano patterning, thin film deposition, replication and characterisation. Structuring technologies, such laser material processing, are most requested.

At KIT, laser processes have been demonstrated to be a perfect tool for precise adjustment or tuning of surface properties and structures of polymers and various thin film materials intended for applications in bio-interfaces, microfluidic chips or thin film electrodes. Different process strategies were developed and applied in order to realize localized chemical patterns, defined morphological structures or topographical modifications and surface structures on µm- and nm-scale. Polymers and amorphous carbon thin films were laser surface treated with respect to modifying their wettability and biocompatibility for applications in micro-fluidic chips and for bio-medical devices. In the case of thin film lithium ion battery development a significant improvement of battery performances was realized by laser structuring and modification of electrode materials deposited by r.f. magnetron sputtering. Selective material removal, thermal effects as well as material redeposition play an important role during formation of micro-topographies, micro-sized periodical cone structures and chemical and morphological changes, which will be discussed with respect to application fields.




Biography of corresponding author


Wilhelm Pfleging received his diploma in physics and his PhD grade from the University of Aachen (RWTH), Germany, in 1993 and 1997, respectively. From 1993 till 1997 he was scientific employee at Fraunhofer Institute for Laser Technology. Since 1997 he is head of group Laser Technology at the Institute for Materials Research I (IMF-I). He has published over 100 papers in scientific journals and conference reports. Since several years he is editor and conference chair of ”Laser-based Micro- and Nanopackaging and Assembly“. Currently his research is focused on the development of new laser-assisted processes for biological interfaces, microfluidics and energy storage systems.