June
12-17, 2011 - Arcachon
The development of alternative solid state electrolytes
is a critical issue for advanced lithium ion batteries; because present batteries
based on liquid organic electrolytes have several disadvantages, such as the
formation of a solid electrolyte interface (SEI) at the anode leading to a
large irreversible capacity loss during cycling, safety and self-discharge
issues. However, the limited ionic
conductivity of solid state electrolytes, which is 3-5 orders smaller than in typical
liquid electrolyte systems, has to be compensated. Thin films are especially
suited for this purpose, because they reduce the diffusion path of lithium ions
due to their small thickness and provide a good thermal and chemical stability.
In this work a combinatorial materials science approach
based on non-reactive magnetron sputtering from segmented targets in a Leybold Z550 coating device was applied in order to develop
thin film solid state electrolytes in the material system Li-V-Si-O (LVSO). In each experiment, several thin
films of different composition and/or microstructure were simultaneously deposited
by placing different substrates in five individual positions relative to the
segmented target. For the deposition onto Si and stainless
steel substrates two different segmented target setups have been used: setup 1 consisting
of two half parts of circular LiVO3 and SiO2 ceramics
and setup 2 composed of Li4SiO4
and V2O5. The influence of the variation of the sputter
pressure (0.075 –25 Pa), the bias voltage (up to -60 V) and the sample position
on composition, crystal structure, morphology, topography and properties
(residual stress, film density, ionic conductivity) will be shown.
Films deposited at
a pressure of 0.15 Pa and a substrate bias of -40 V using setup 1 remained X-ray-amorphous and Raman-inactive even after furnace
annealing (3 h at 600 °C in Ar:O2 = 4.5:5 atmosphere of 10 Pa).
The
ionic conductivity of these Li1.33V0.77Si0.35O4
films at room temperature was determined to be 2.8´10-5 S/cm.
Using setup 2 amorphous Li1.2V1.3Si0.7O4
thin films could be deposited at a pressure of 0.5 Pa without bias voltage that
transformed into a crystalline
orthorhombic phase after annealing and showed an even higher ionic
conductivity of up to 6.5´10-5 S/cm, which is significantly higher than all values for the Li-V-Si-O
system or any other thin film electrolyte system reported in literature up to
now. First results for thin film Li-ion batteries realized by combining these
optimized LVSO thin films with standard materials for cathode and anode thin
films will be presented.